Title :
Hollow cathode electron gun for beam generation in forevacuum gas pressure
Author :
Burdovitsin, Viktor ; Oks, Efim ; Serov, Alexander
Author_Institution :
State Univ. of The Control Syst. & Radioelectron., Tomsk, Russia
fDate :
6/20/1905 12:00:00 AM
Abstract :
Characteristics, performance and design features of a filament-less plasma cathode electron gun for beam generation in forevacuum gas pressure range are presented, The plasma cathode is based on hollow cathode DC discharge. Using method of “grid stabilization”, it was possible to generate e-beam under the background gas pressure as high as about 10-1 torr. This pressure can be easy obtained by mechanical pump. Presence of a magnetic field is one of requests for several applications, such as plasma chemistry and surface treatment processes. So operation of the gun under the B-field up to 0.1 T was investigated. It was observed an influence of the B-field both on discharge and emission parameters of the gun. The results obtained can be explained based on idea of electron confinement by magnetic field and it´s motion across the B-field, With the accelerating voltage up to 8 kV the gun is able to generate of about 0.7 A DC electron beam
Keywords :
electron beams; electron guns; electron sources; glow discharges; plasma applications; 0.1 T; 0.1 torr; 0.7 A; 8 kV; B-field; beam generation; design features; e-beam; electron confinement; emission parameters; filament-less plasma cathode electron gun; forevacuum gas pressure; grid stabilization; hollow cathode DC discharge; hollow cathode electron gun; performance; plasma cathode; plasma chemistry; surface treatment processes; Cathodes; Character generation; DC generators; Electron beams; Magnetic fields; Particle beams; Plasma chemistry; Plasma properties; Surface discharges; Surface treatment;
Conference_Titel :
High-Power Particle Beams, 1998. BEAMS '98. Proceedings of the 12th International Conference on
Conference_Location :
Haifa
Print_ISBN :
0-7803-4287-9
DOI :
10.1109/BEAMS.1998.822467
