• DocumentCode
    1609304
  • Title

    The compound oxides based on TiO2 and NiO thin films for low temperature gas detection

  • Author

    Kosc, I. ; Hotovy, I. ; Kompitsas, M. ; Grieseler, R. ; Wilke, M. ; Rehacek, V. ; Predanocy, M. ; Kups, T. ; Spiess, L.

  • Author_Institution
    Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia
  • fYear
    2010
  • Firstpage
    337
  • Lastpage
    340
  • Abstract
    The multilayer compound thin films, consisted of metal oxides (TiO2 and NiO) prepared by dc magnetron sputtering technique, have been studied. The structural, compositional, electrical and gas sensing properties have been investigated by XRD, GDOES and Van der Pauw method considering changes in layout, annealing temperature and addition of Au noble metal catalyst. The Au modified compound oxides exhibit fast response and enhanced sensitivity to hydrogen at low operating temperatures.
  • Keywords
    X-ray diffraction; gas sensors; nickel compounds; sputtering; thin films; titanium compounds; GDOES; NiO; TiO2; Van der Pauw method; XRD; compound oxides; dc magnetron sputtering technique; gas sensing properties; low temperature gas detection; multilayer compound thin films; noble metal catalyst; thin films; Annealing; Compounds; Films; Layout; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
  • Conference_Location
    Smolenice
  • Print_ISBN
    978-1-4244-8574-1
  • Type

    conf

  • DOI
    10.1109/ASDAM.2010.5666355
  • Filename
    5666355
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1609304