Title :
Synthesis and Basic Properties of Ferroelectric Thin Films. Methods Materials and Novel Applications
Author :
Czekaj, D. ; Jaszczyszyn, E. ; Orkisz, T. ; Kozielski, L. ; Lisiiiska-Czekaj, A. ; Federowicz, E. ; Modelski, J.
Author_Institution :
Univ. of Silesia, Sosnowiec
Abstract :
The present study is devoted to synthesis and investigation of basic properties of ferroelectric thin films. The radio frequency sputtering method was utilized to grow Pb(Zr1.xTix)O3 -based ferroelectric thin films (PZT) whereas the sol-gel-type chemical solution deposition method was used for preparation of Bi4Ti3O12 (BTO) and (Ba0.6Sr0.4)TiO3 (BST) thin films. The thin films were characterized in terms of their microstructure, crystalline structure, chemical composition and dielectric properties. Complex impedance spectroscopy was used to measure frequency-dependent dielectric properties of the thin films. Great application potential of the ferroelectric thin films was considered especially as active elements of the piezoelectric sensors (PZT), UV-radiation detectors (BTO) and tunable microwave devices (BST).
Keywords :
barium compounds; bismuth compounds; crystal microstructure; crystal structure; ferroelectric materials; ferroelectric thin films; lead compounds; liquid phase deposition; materials preparation; permittivity; sol-gel processing; sputter deposition; strontium compounds; zirconium compounds; Ba0.6Sr0.4TiO3; Bi4Ti3O12; PZT; UV-radiation detectors; chemical composition; complex impedance spectroscopy; crystalline structure; ferroelectric thin film growth; ferroelectric thin film synthesis; frequency-dependent dielectric properties; microstructure; permittivity; piezoelectric sensors; radio frequency sputtering deposition method; sol-gel-type chemical solution deposition method; tunable microwave devices; Binary search trees; Bismuth; Chemicals; Dielectric thin films; Ferroelectric materials; Piezoelectric films; Radio frequency; Sputtering; Thin film sensors; Transistors;
Conference_Titel :
Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
Conference_Location :
Krakow
Print_ISBN :
978-83-906662-7-3
DOI :
10.1109/MIKON.2006.4345275
