Optimisation of H/sub 2/-HCI-Ne Buffer Gas Mixtures Used in Kinetically Enhanced Copper Vapour Layers

Author

Withford, Michael J. ; Brown, D.J.W. ; Carman, R.J. ; Piper, J.A.

Author_Institution

Macquarie University

fYear

1998

Firstpage

342

Lastpage

342

Keywords

Copper;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

DOI

10.1109/CLEOE.1998.719528

Filename

719528

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