Improvement of SIMS multilayer profile analysis

SIMS deconvolution of boron delta doped multilayer has been successfully performed using a synthetic algorithm without the requirement of specific and detailed knowledge of response functions from measurements of delta layers which often is not available. This algorithm is based on partial deconvolution and scale-frequency shrinkage. The contributions of high frequency noise are removed by scale-frequency shrinkage. The partial deconvolution addresses to remove the residual ion mixing effect. It is shown that this algorithm leads to an enhancement of the depth resolution by a factor 2 compared to that before deconvolution without producing artifacts and aberrations which are physically not accepted.