Diagnostics of the laser carbon plasma in different environments during DLC deposition

Author

Sharma, Arvind Kumar ; Wei, Qingping ; Narayan, R.J. ; Oktyabrsky, Serge ; Narayan, J.

Author_Institution

Dept. of Mater. Sci. & Eng., North Carolina State Univ., Raleigh, NC, USA

fYear

1998

Firstpage

156

Abstract

Summary form only given. Construction of the West Virginia University (WVU) Large Experiment on Instabilities and Anisotropies (LEIA) is now complete. LEIA is designed to investigate a wide variety of high beta, space relevant plasma phenomena. Of particular interest are electromagnetic instabilities driven by the free energy associated with non-isotropic ion distributions, i.e., different parallel and perpendicular ion temperatures. These instabilities occur at plasma betas (P=87tkTIB2) of order unity and ion temperature anisotropies, perpendicular divided by parallel, over the range 0.25 to 4.0. The plasma for LEIA is generated with a steady-state helicon plasma source.

Keywords

carbon; 248 nm; C; DLC deposition; KrF excimer laser; Raman spectroscopy; [001]Si substrates; ablation; amorphous films; atomic bonding; bonding; correlation; diagnostics; graphite target; laser C plasma; laser plasma environment; laser-generated plasma plume; optical emission spectroscopy; plasma plume; pulsed laser deposition; room temperature; short-range atomic order; structure; transmission electron microscopy; ultrahigh purity Ar; ultrahigh purity N/sub 2/; Atom optics; Bonding; Laser ablation; Optical films; Plasma diagnostics; Plasma properties; Plasma temperature; Pulsed laser deposition; Raman scattering; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on

Conference_Location

Raleigh, NC, USA

ISSN

0730-9244

Print_ISBN

0-7803-4792-7

Type

conf

DOI

10.1109/PLASMA.1998.677568

Filename

677568