Title :
Diagnostics of the laser carbon plasma in different environments during DLC deposition
Author :
Sharma, Arvind Kumar ; Wei, Qingping ; Narayan, R.J. ; Oktyabrsky, Serge ; Narayan, J.
Author_Institution :
Dept. of Mater. Sci. & Eng., North Carolina State Univ., Raleigh, NC, USA
Abstract :
Summary form only given. Construction of the West Virginia University (WVU) Large Experiment on Instabilities and Anisotropies (LEIA) is now complete. LEIA is designed to investigate a wide variety of high beta, space relevant plasma phenomena. Of particular interest are electromagnetic instabilities driven by the free energy associated with non-isotropic ion distributions, i.e., different parallel and perpendicular ion temperatures. These instabilities occur at plasma betas (P=87tkTIB2) of order unity and ion temperature anisotropies, perpendicular divided by parallel, over the range 0.25 to 4.0. The plasma for LEIA is generated with a steady-state helicon plasma source.
Keywords :
carbon; 248 nm; C; DLC deposition; KrF excimer laser; Raman spectroscopy; [001]Si substrates; ablation; amorphous films; atomic bonding; bonding; correlation; diagnostics; graphite target; laser C plasma; laser plasma environment; laser-generated plasma plume; optical emission spectroscopy; plasma plume; pulsed laser deposition; room temperature; short-range atomic order; structure; transmission electron microscopy; ultrahigh purity Ar; ultrahigh purity N/sub 2/; Atom optics; Bonding; Laser ablation; Optical films; Plasma diagnostics; Plasma properties; Plasma temperature; Pulsed laser deposition; Raman scattering; Spectroscopy;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677568
