Title :
A CPU on a plastic film substrate
Author :
Takayama, Toru ; Ohno, Yumiko ; Goto, Yugo ; Machida, Asami ; Fujita, Masayuki ; Maruyama, Junya ; Kato, Kiyoshi ; Koyama, Jun ; Yamazaki, Shumpei
Author_Institution :
Semicond. Energy Lab. Co. Ltd., Kanagawa, Japan
Abstract :
A CPU using a high performance poly-silicon TFT is successfully fabricated on a plastic film substrate by a TFT transfer technology onto a plastic film substrate we developed. No performance degradation by the transfer process was observed, and we confirmed the CPU operation at the frequency of more than 10MHz with a power source voltage 33V.
Keywords :
elemental semiconductors; liquid crystal displays; polymer films; silicon; CPU; plastic film substrate; Central Processing Unit; Degradation; Displays; Fabrication; Glass; Logic circuits; Plastic films; Substrates; Thin film transistors; Voltage;
Conference_Titel :
VLSI Technology, 2004. Digest of Technical Papers. 2004 Symposium on
Print_ISBN :
0-7803-8289-7
DOI :
10.1109/VLSIT.2004.1345496
