Title :
Fabrication study of calcium zinc oxide with indium doping prepared by spray pyrolysis
Author :
Yen Wen Wang ; Che Ching Hsu ; Hsin Yu Chung ; Wei Hsuan Hsu ; Chun Yi Lee ; Yu Hsuan Huang ; Wen How Lan ; Ming Chang Shih
Author_Institution :
Dept. of Electr. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
Abstract :
The transparent film calcium zinc oxide with indium doping was prepared by spray pyrolysis with calcium nitrate, zinc acetate and indium nitrate precursors. With the increasing of calcium nitrate concentration, the blue shift of cutoff wavelength in the film transmission spectra can be observed. The optical bandgap for ZnO:In and CaZnO:In thin films were 3.34 and 3.41 eV, respectively. N-type conduction was observed for the indium doped thin films. With the increasing of indium nitrate concentration, the film conductivity, concentration and mobility were characterized. The indium doped CaZnO thin film shows the talent performance in the application of high band gap transparent conducting film.
Keywords :
II-VI semiconductors; calcium compounds; carrier density; carrier mobility; doping profiles; electrical conductivity; energy gap; indium; optical constants; photoluminescence; pyrolysis; semiconductor doping; semiconductor growth; semiconductor thin films; spectral line shift; spray coating techniques; transparency; wide band gap semiconductors; zinc compounds; CaZnO:In; N-type conduction; ZnO:In; blue shift; calcium nitrate concentration; cutoff wavelength; doping concentration; film conductivity; film transmission spectra; high band gap transparent conducting film; indium doped thin films; indium doping; indium nitrate precursors; mobility; optical band gap; spray pyrolysis; transparent film calcium zinc oxide; zinc acetate; Calcium; Doping; Films; Indium; Photonic band gap; Physics; Zinc oxide;
Conference_Titel :
Next-Generation Electronics (ISNE), 2014 International Symposium on
Conference_Location :
Kwei-Shan
DOI :
10.1109/ISNE.2014.6839350
