Title :
Microwave Measurements of Thickness of Nanometer Metal Layers and Conductivity of Semiconductor in Structures "Metal-Semiconductor"
Author :
Usanov, Dmitry A. ; Skripal, Alexander V. ; Abramov, Anton V. ; Bogolyubov, Anton S.
Author_Institution :
Saratov State Univ., Saratov
Abstract :
Peculiarities of interaction of electromagnetic radiation with nanometer metal-semiconductor structures have been investigated theoretically and experimentally. Method for nondestructive multiparameter check of electrophysical parameters of nanometer metal-semiconductor structures using frequency dependence of reflectance and transmittance had been proposed and implemented experimentally.
Keywords :
microwave measurement; nondestructive testing; semiconductor-metal boundaries; thickness measurement; electromagnetic radiation interaction; electrophysical parameter; microwave measurement; nanomerter metal-semiconductor structure; nanometer metal layer thickness; nondestructive multiparameter checking; Conductivity measurement; Dielectric substrates; Electromagnetic measurements; Electromagnetic scattering; Electromagnetic waveguides; Microwave measurements; Nanostructures; Reflectivity; Semiconductor waveguides; Thickness measurement;
Conference_Titel :
Microwaves, Radar & Wireless Communications, 2006. MIKON 2006. International Conference on
Conference_Location :
Krakow
Print_ISBN :
978-83-906662-7-3
DOI :
10.1109/MIKON.2006.4345379
