Interfacing fluidic sensors based on LTCC

Author

Gruchow, M. ; Schirmer, M. ; Uhlemann, J. ; Rebenklau, L. ; Wolter, K.J.

Author_Institution

Dept. of Electr. Eng. & Inf. Technol., Tech. Univ. Dresden, Dresden, Germany

fYear

2008

Firstpage

468

Lastpage

472

Abstract

Fluidic sensors can be easily integrated in Low Temperature Cofiring Ceramic (LTCC) systems. This article describes electronic circuits for interfacing typical fluidic sensors, e.g. piezoresistive pressure transducers, anemometric flow meters and capacitive transducers. Due to their character the sensor signal have to be amplified, offset and temperature compensated and filtered. Furthermore the original physical value of these electrical signals has to be recalculated. On this basis some models for the transducers were designed.

Keywords

anemometry; capacitive sensors; ceramics; flowmeters; fluidic devices; piezoresistive devices; pressure transducers; LTCC; anemometric flow meters; capacitive transducers; electrical signals; electronic circuits; fluidic sensors; low temperature cofiring ceramic systems; piezoresistive pressure transducers; temperature compensation; Bridge circuits; Capacitive sensors; Chemical sensors; Inductors; Resistors; Temperature dependence; Temperature sensors; Thick film sensors; Thick films; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on

Conference_Location

Budapest

Print_ISBN

978-1-4244-3972-0

Electronic_ISBN

978-1-4244-3974-4

Type

conf

DOI

10.1109/ISSE.2008.5276611

Filename

5276611