Title :
Magnetic microscopy for ICs failure analysis : comparative case studies using SQUID, GMR and MTJ systems
Author :
Crepel, Olivier ; Poirier, P. ; Descamps, Philippe
Author_Institution :
LaMIP, Philips Semicond., Caen, France
Abstract :
Magnetic field based techniques have shown great capabilities for investigation of current flows in ICs. After reviewing the performances of SQUID, GMR (hard disk head technologies) and MTJ existing sensors, we present results obtained on various case studies. This comparison shows the benefit of each approach according to each case study (packaged devices, flip-chip circuits,...). Finally we discuss the obtained results to classify current techniques, optimal domain of applications and advantages.
Keywords :
SQUID magnetometers; electric current measurement; failure analysis; giant magnetoresistance; integrated circuit measurement; integrated circuit testing; magnetic field measurement; magnetic sensors; GMR sensors; IC failure analysis; MTJ sensors; SQUID; contact-less techniques; current flow investigation; flip-chip circuits; hard disk head technologies; magnetic field analysis techniques; magnetic microscopy; packaged devices; Computer aided software engineering; Failure analysis; Magnetic field measurement; Magnetic flux; Magnetic sensors; Magnetic separation; Micromagnetics; SQUIDs; Spatial resolution; Superconducting magnets;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2004. IPFA 2004. Proceedings of the 11th International Symposium on the
Print_ISBN :
0-7803-8454-7
DOI :
10.1109/IPFA.2004.1345534
