• DocumentCode
    161214
  • Title

    Novel laser scribed graphene devices

  • Author

    He Tian ; Yi Shu ; Ya-Long Cui ; Yi Yang ; Tian-Ling Ren

  • Author_Institution
    Tsinghua Nat. Lab. for Inf. Sci. & Technol. (TNList), Tsinghua Univ., Beijing, China
  • fYear
    2014
  • fDate
    7-10 May 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Wafer-scale graphene devices could be fabricated by one step laser scribing method. Four kinds of novel laser scribed graphene devices have been developed, including in-plane transistors, photodetectors, loudspeakers and strain sensors. The in-plane graphene transistors have a large on/off ratio up to 5.34. The graphene photodetector arrays were achieved with photo responsivity as high as 0.32 A/W. The graphene loudspeakers realize wide-band sound generation from 1 to 50 kHz. The graphene strain sensor has the gauge factor of 0.11. These results demonstrated that the laser scribed graphene could be used for wafer-scale integration of a variety of graphene-based devices.
  • Keywords
    graphene; laser beam applications; gauge factor; graphene loudspeakers; graphene photodetector arrays; graphene strain sensor; in-plane graphene transistors; laser scribed graphene devices; one step laser scribing method; wafer-scale graphene devices; wafer-scale integration; wideband sound generation; Graphene; Lasers; Loudspeakers; Photodetectors; Strain; Transistors; Graphene Devices; Laser Scribing; Sensors; Wafer-scale;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Next-Generation Electronics (ISNE), 2014 International Symposium on
  • Conference_Location
    Kwei-Shan
  • Type

    conf

  • DOI
    10.1109/ISNE.2014.6839389
  • Filename
    6839389