Technology-portable mixed-signal sensing architecture for CMOS-integrated z-axis surface-micromachined accelerometers

Author

Michalik, Piotr ; Napieralski, Andrzej ; Fernández, Daniel ; Madrenas, Jordi

Author_Institution

Dept. of Microelectron. & Comput. Sci., Tech. Univ. of Lodz, Lodz, Poland

fYear

2010

Firstpage

431

Lastpage

435

Abstract

This paper reports mixed-signal front-end architecture for z-axis capacitive inertial surface-micromachined MEMS accelerometer. The method consists in capacitance to frequency to digital conversion with the aid of relaxation oscillator and high-precision digital frequency demodulator based on counters for coarse measurement and tapped delay line for fine measurement. This approach allows rapid prototyping based mainly on standard digital synthesis and automated place-and-route, what is especially important in case of CMOS integrated microsensors - the target application of the architecture.

Keywords

CMOS digital integrated circuits; accelerometers; microsensors; CMOS integrated microsensor; CMOS integrated z-axis surface micromachined accelerometer; MEMS accelerometer; counter; digital frequency demodulator; mixed signal front end architecture; mixed signal sensing; relaxation oscillator; Accelerometers; CMOS integrated circuits; Delay lines; Frequency measurement; Micromechanical devices; Oscillators; Sensors; Accelerometers; CMOS-MEMS; Inertial Sensors; Relaxation Oscillators; Surface Micromachining; Tapped Delay Lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Mixed Design of Integrated Circuits and Systems (MIXDES), 2010 Proceedings of the 17th International Conference

Conference_Location

Warsaw

Print_ISBN

978-1-4244-7011-2

Electronic_ISBN

978-83-928756-4-2

Type

conf

Filename

5551328