Chemo-optical sensor for toxic gases detection

Many applications in the field of toxicology and laboratory medicine as well as some air pollution applications require low concentrations levels for toxic gas detection and its real-time monitoring. The authors have designed and manufactured an experimental integrated chemo-optical sensor on silicon containing a sol-gel layer, a silicon nitride waveguide and a silicon photodiode. The first measurements realized on an experimental structure show a good correlation with the requirements of the Romanian standards in the fields as well as EPA standards