• DocumentCode
    1612359
  • Title

    Fabrication of metallic hard mold for polymeric waveguides with embedded micro-mirrors

  • Author

    Dou, Xinyuan ; Wang, Xiaolong ; Huang, Haiyu ; Lin, Xiaohui ; Chen, Ray T.

  • Author_Institution
    Microelectron. Res. Center, Univ. of Texas at Austin, Austin, TX, USA
  • fYear
    2010
  • Firstpage
    101
  • Lastpage
    102
  • Abstract
    In this paper, we presented fabrication of nickel metal mold with 45° tilted surfaces on both waveguide ends through electroplating process. To obtain 45° angle, SU-8 was exposed under D.I. water, with repeatable 0.5° error.
  • Keywords
    electroplating; integrated optics; micromirrors; moulding; nickel; optical fabrication; optical interconnections; optical polymers; optical waveguides; Ni; electroplating; embedded micromirrors; metallic hard mold; nickel metal mold; optical interconnects; polymeric waveguides; Electromagnetic waveguides; Optical arrays; Optical device fabrication; Optical interconnections; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Polymers; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Society Winter Topicals Meeting Series (WTM), 2010 IEEE
  • Conference_Location
    Majorca
  • Print_ISBN
    978-1-4244-5240-8
  • Electronic_ISBN
    978-1-4244-5241-5
  • Type

    conf

  • DOI
    10.1109/PHOTWTM.2010.5421953
  • Filename
    5421953
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1612359