DocumentCode
1612369
Title
LTCC microreactor with thermal stabilization
Author
Bembnowicz, Pawel ; Golonka, Leszek J.
Author_Institution
Wroclaw Univ. of Technol., Wroclaw, Poland
fYear
2008
Firstpage
276
Lastpage
279
Abstract
The paper presents application of the LTCC (low temperature co-fired ceramic) technology in microsystems. A heated chamber with additional temperature sensors is demonstrated. The aim of the work is to obtain heated microchamber characterized by small thermal inertia and uniform distribution of the temperature inside. The finite element analyses (FEA) are used to demonstrate thermal properties of designed device. Moreover, the temperature distribution on the surface of the microreactor is measured. The proper temperature management is achieved.
Keywords
ceramic packaging; finite element analysis; microreactors; temperature distribution; thermal stability; (low temperature cofired ceramic; FEA; LTCC microreactor; finite element analyses; heated microchamber; temperature distribution; temperature sensors; thermal stabilization; Ceramics; Chemical reactors; Consumer electronics; Electronic packaging thermal management; Lamination; Optical sensors; Photonics; System-on-a-chip; Temperature sensors; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on
Conference_Location
Budapest
Print_ISBN
978-1-4244-3972-0
Electronic_ISBN
978-1-4244-3974-4
Type
conf
DOI
10.1109/ISSE.2008.5276631
Filename
5276631
Link To Document