DocumentCode
1612665
Title
Simulation and modeling of laser ablation
Author
Hurtony, Tamás
Author_Institution
Dept. of Electron. Technol., Budapest Univ. of Technol. & Econ., Budapest, Hungary
fYear
2008
Firstpage
452
Lastpage
457
Abstract
Since laser micromachining problems are reasonable research areas, many efforts have been made in order to describe the ablation method quantitatively. This paper presents a general overlook on the wide variety of choices and the properties of the ideal simulation is discussed. By using these experiences an alternative simulation program is presented.
Keywords
laser ablation; micromachining; laser ablation; laser micromachining; simulation program; Computational modeling; Electrons; Laser ablation; Laser modes; Lattices; Micromachining; Optical pulses; Pulsed laser deposition; Temperature; Thermal conductivity; Modeling and simulation; flexibility; laser ablation; modeling software; simulation techniques;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on
Conference_Location
Budapest
Print_ISBN
978-1-4244-3972-0
Electronic_ISBN
978-1-4244-3974-4
Type
conf
DOI
10.1109/ISSE.2008.5276647
Filename
5276647
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