Title :
A novel approach to electronic nose-head design, using a copper thin film electrode patterning technique
Author :
Arshak, K. ; Cunniffe, C. ; Moore, E. ; Cavanagh, L. ; Harris, J.
Author_Institution :
Dept. of Electron. & Comput. Eng., Limerick Univ.
Abstract :
Presented in this paper is a process for manufacturing copper electrode patterns on alumina substrates using thin film deposition, spin coating and printed circuit board (PCB) etching techniques. The process was used for the design and manufacture of an array of gas sensors for use in an electronic nose system. This approach was executed in three phases. Firstly a 500nm layer of copper was deposited onto the alumina substrate. Secondly photoresist was applied by spin coating onto the copper layer and finally the PCB etching process was used to achieve the final electrode pattern. Conducting polymer composite materials were deposited onto the resulting electrode patterns producing an array of sensors for vapour detection. The sensor array showed good responses to Propanol at concentrations ranging from 5000ppm to 30000ppm with fast recovery times. The sensor array was slotted into an electronic nose system and an illustrative analysis of the sensor array´s ability to discriminate between different solvents was carried out with promising results
Keywords :
aluminium compounds; composite materials; conducting polymers; copper; electrodes; electronic noses; etching; printed circuits; spin coating; 500 nm; Al2O3-Cu; Propanol; alumina substrates; conducting polymer composite materials; copper thin film electrode patterning; electronic nose-head design; gas sensor array; photoresist; printed circuit board etching; spin coating; thin film deposition; vapour detection; Coatings; Copper; Electrodes; Electronic noses; Etching; Manufacturing processes; Sensor arrays; Sensor systems; Substrates; Transistors;
Conference_Titel :
Electronics Technology: Meeting the Challenges of Electronics Technology Progress, 2005. 28th International Spring Seminar on
Conference_Location :
Wiener Neustadt
Print_ISBN :
0-7803-9325-2
DOI :
10.1109/ISSE.2005.1491024