Title :
Fabrication of silicon quarter wave plate at Terahertz frequency
Author :
Saha, Shimul C. ; Ma, Yong ; Grant, James P. ; Khalid, A. ; Cumming, David R S
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow, UK
Abstract :
We have developed anisotropically etched artificial dielectric quarter wave plates (QWPs) for use at 1.5 and 2.5 Terahertz. A SU8 anti-reflection coating is used to further improve the transmission coefficient by up to 12%.
Keywords :
antireflection coatings; elemental semiconductors; etching; high-speed optical techniques; optical fabrication; silicon; terahertz waves; SU8 anti-reflection coating; anisotropically etched artificial dielectric quarter wave plates; frequency 1.5 THz; frequency 2.5 THz; transmission coefficient; Dielectric substrates; Etching; Fabrication; Frequency; Gratings; Optical imaging; Optical retarders; Scanning electron microscopy; Silicon; Tellurium;
Conference_Titel :
Photonics Society Winter Topicals Meeting Series (WTM), 2010 IEEE
Conference_Location :
Majorca
Print_ISBN :
978-1-4244-5240-8
Electronic_ISBN :
978-1-4244-5241-5
DOI :
10.1109/PHOTWTM.2010.5421976
