Title :
Diamond technology for electronics and MEMS: review of status and perspectives
Author :
Kohn, E. ; Ebert, W. ; Aleksov, A. ; Denisenko, A. ; Adamschik, M. ; Schmid, P.
Author_Institution :
Dept. of Electron Devices & Circuits, Ulm Univ., Germany
fDate :
6/24/1905 12:00:00 AM
Abstract :
Diamond has been considered a material with extreme mechanical properties for a long time, but is also a wide bandgap semiconductor, potentially enabling electronic and microsystems device characteristics which are currently out of reach. Recent progress has however allowed verification of many ideal diamond materials properties in devices. Two basic electronic components are discussed (FETs and microswitches), which may be viewed as building blocks for future ultra high power high temperature electronics.
Keywords :
diamond; elemental semiconductors; field effect transistors; high-temperature electronics; micromechanical devices; power semiconductor devices; semiconductor switches; technological forecasting; wide band gap semiconductors; C; FET; MEMS; diamond materials properties; diamond materials technology; electronic components; electronic device characteristics; electronics; mechanical properties; microswitch; microsystems device characteristics; ultra high power high temperature electronics; wide bandgap semiconductor; Coatings; Diamond-like carbon; Insulation; Material properties; Micromechanical devices; Plasma temperature; Rough surfaces; Semiconductor materials; Surface roughness; Thermal stresses;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003149
