Source of Low-Energy High-Current Gaseous Ion Flow Based on a Discharge with Electron Injection

Summary form only given. A novel technique of low-energy high current gaseous ion flow generation was explored and an ion source based on this technique was developed. The source utilizes a DC high-current (up to 35 A) gaseous discharge with electron injection into the cathode region. Electron generation and injection is accomplished by using an additional arc discharge with a "cold" (filament less) hollow cathode. Low contamination of plasma is achieved by low discharge voltage (avoidance of sputtering), as well as by special geometric configuration of the emitter discharge electrodes thereby filtering (removing) the erosion products stemming from the emitter cathode.