DocumentCode
1613907
Title
Mechanical influences on the electrical characteristics of the mobile gate MOS capacitors
Author
Dobrescu, L. ; Dobrescu, D. ; Rusu, A. ; Ravariu, C.
Author_Institution
Fac. of Electron. & Telecommun., Politehnic Univ. of Bucharest, Romania
Volume
1
fYear
2002
fDate
6/24/1905 12:00:00 AM
Firstpage
227
Abstract
This paper presents the model for an electromechanical variable capacitor designed as an MOS capacitor with a beam. It studies the influences of the beam on the electrical characteristics of the capacitor.
Keywords
BiCMOS integrated circuits; MOS capacitors; electromechanical filters; BiCMOS; electrical characteristics; electromechanical variable capacitor; mobile gate MOS capacitors; Electric variables; Electrostatics; Filters; MOS capacitors; Mathematical model; Radio frequency; Springs; Tunable circuits and devices; Voltage; Voltage-controlled oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN
0-7803-7235-2
Type
conf
DOI
10.1109/MIEL.2002.1003181
Filename
1003181
Link To Document