Title :
Gripping tools for handling and assembly of microcomponents
Author :
Petrovic, Dragan ; Popovic, Gordana ; Chatzitheodoridis, Elias ; Del Medico, Oscar ; Almansa, Ana ; Sümecz, Franz ; Brenner, Werner ; Detter, Helmut
Author_Institution :
Inst. for Micro Technique & Precision Eng., Wien Univ. of Technol., Vienna, Austria
fDate :
6/24/1905 12:00:00 AM
Abstract :
In this paper a vacuum gripper for handling of microstructures in MST will be presented as well as the design, production and testing of two types of mechanical micro-grippers used for handling and assembly of microcomponents. One of them is with the possibility of optical force sensing.
Keywords :
force sensors; microassembling; micromanipulators; optical sensors; MST; gripping tools; micro system technology; microcomponent assembly; microcomponent handling; microstructures; optical force sensing; vacuum gripper; Arm; Assembly; Biomedical optical imaging; Grippers; Medical tests; Microstructure; Optical sensors; Production; Shape; Springs;
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003186
