Title :
ICMTS 1991. Proceedings of the 1991 International Conference on Microelectronic Test Structures (Cat. No.91CH2907-4)
Abstract :
The following topics are dealt with: test structures for material and process characterization; test structures for reliability analysis; circuit oriented test structures; test structures for dimensional control; test structures for dopant distribution analysis; and modeling and parameter extraction
Keywords :
circuit reliability; integrated circuit technology; integrated circuit testing; large scale integration; production testing; circuit oriented test structures; dimensional control; dopant distribution analysis; material characterization; modeling; parameter extraction; process characterization; reliability analysis;
Conference_Titel :
Microelectronic Test Structures, 1991. ICMTS 1991. Proceedings of the 1991 International Conference on
Conference_Location :
Kyoto, Japan
Print_ISBN :
0-87942-588-1
DOI :
10.1109/ICMTS.1990.161691
