Implementation of MIMO R2R control regulation on furnaces processes

With geometries scaling down and the considerable multiplication of process recipes used in production for the same furnace, it becomes more and more difficult and hard to tune all process recipes correctly to achieve target deposition thickness performances. In this paper diffusion furnace recipes control using run to run (R2R) will be presented and described. The goal is to be able to control all furnace recipes using transfer models and corrective factors.