• DocumentCode
    1616241
  • Title

    Rule induction for identifying multi layer tool commonalities

  • Author

    Borisov, Alexander ; Chikalov, Igor ; Pierre, Eric St ; Tuv, Eugene

  • Author_Institution
    Intel Corp., Chandler, AZ, USA
  • fYear
    2010
  • Firstpage
    322
  • Lastpage
    327
  • Abstract
    A methodology based on association rule concepts is given for detecting fab tool commonality of affected lots. The performance of the methodology is then compared to several traditional methods such as ANOVA and contingency tables using eight actual production cases. In each case, the offending tool is affecting lots at multiple process layers.
  • Keywords
    data mining; statistical analysis; ANOVA; association rule induction; contingency tables; fab tool commonality detection; multilayer tool commonalities identification; statistical analysis; Algorithm design and analysis; Analysis of variance; Association rules; Databases; Fault diagnosis; Production; Radio access networks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI
  • Conference_Location
    San Francisco, CA
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4244-6517-0
  • Type

    conf

  • DOI
    10.1109/ASMC.2010.5551477
  • Filename
    5551477
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1616241