Title :
Silicon-resonator-based, 3µA real-time clock with ±5ppm frequency accuracy
Author :
Ruffieux, David ; Pezous, Aurélie ; Pliska, Anne-Claire ; Krummenacher, François
Author_Institution :
CSEM, Neuchatel
Abstract :
This paper bridges the gap with the demonstration of a generic ultra-low power thermal compensation concept applied to a low frequency piezoelectric AIN-driven silicon resonator [1 ] that can be used to implement both a RTC and a reference for a MEMS-based frequency synthesizer architecture eliminating the need for any other bulky reference.
Keywords :
crystal resonators; frequency synthesizers; micromechanical resonators; MEMS-based frequency synthesizer architecture; generic ultralow power thermal compensation concept; ppm frequency accuracy; real-time clock; silicon-resonator; Capacitance; Clocks; Fabrication; Frequency conversion; Jitter; Oscillators; Phase noise; Resistors; Silicon; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference - Digest of Technical Papers, 2009. ISSCC 2009. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-3458-9
DOI :
10.1109/ISSCC.2009.4977382
