Title :
Active oxygen detection using Quartz Crystal Microbalance method under inductively coupled oxygen plasma
Author :
Matsumoto, Hiroyuki ; Matsuoka, Mikihiko ; Noda, Kazutoshi
Author_Institution :
Corp. Adv. Technol. Center, Iwasaki Electr. Co., Ltd., Gyoda
Abstract :
Active oxygen generated under inductively coupled oxygen plasma such as atomic oxygen radicals and molecular oxygen radicals has been successfully monitored utilizing the Ag(silver)-coated and Carbon-coated Quartz Crystal Microbalance (QCM) method. The Ag-coated QCM showed a frequency shift (i.e., mass change on the electrode surface of the crystal) of over 6500 Hz in 100 seconds, which corresponds to an increase of approximately 6500 ng in mass conversion while the Carbon-coated QCM showed a slight mass-decrease in 300 seconds.
Keywords :
chemical sensors; microbalances; active oxygen detection; atomic oxygen radicals; electrode surface; inductively coupled oxygen plasma; mass conversion; molecular oxygen radicals; quartz crystal microbalance method; Atomic measurements; Electrodes; Electron tubes; Frequency measurement; Glass; Plasma measurements; Plasma sources; Radio frequency; Silver; Surface cleaning; active oxygen; inductively coupled plasma; oxygen radicals; quartz crystal microbalance;
Conference_Titel :
Control, Automation and Systems, 2008. ICCAS 2008. International Conference on
Conference_Location :
Seoul
Print_ISBN :
978-89-950038-9-3
Electronic_ISBN :
978-89-93215-01-4
DOI :
10.1109/ICCAS.2008.4694461
