DocumentCode
1617178
Title
Extraction of the interfacial generation velocity in MOSFETs
Author
Dugas, J. ; Jérisian, R. ; Oualid, J. ; Labrunye, D. ; Mirabel, J.M.
Author_Institution
Lab. des Materiaux et Composants Semi-Cond., Domaine Univ. de Saint-Jerome, Marseille, France
fYear
1990
Firstpage
11
Lastpage
15
Abstract
A novel method based upon gate controlled diode static characteristics is proposed to determine the interfacial generation velocity S o in MOSFETs. S o is deduced from the measurement of the apparent generation velocity of two long transistors with different channel lengths. Results concerning natural or implanted transistors, with single or double diffused drains, are presented and discussed
Keywords
carrier mobility; insulated gate field effect transistors; ion implantation; MOSFETs; apparent generation velocity; channel lengths; double diffused drains; gate controlled diode static characteristics; implanted transistors; interfacial generation velocity; long transistors; single diffused drains; Character generation; Current measurement; Diodes; Interface states; Leakage current; Length measurement; MOSFETs; Performance evaluation; Velocity control; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronic Test Structures, 1991. ICMTS 1991. Proceedings of the 1991 International Conference on
Conference_Location
Kyoto
Print_ISBN
0-87942-588-1
Type
conf
DOI
10.1109/ICMTS.1990.161705
Filename
161705
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