Title :
An interface for a 300°/s capacitive 2-axis micro-gyroscope with pseudo-CT readout
Author :
Aaltonen, Lasse ; Speeti, Timo ; Saukoski, Mikko ; Halonen, Kari
Author_Institution :
Helsinki Univ. of Technol., Espoo
Abstract :
The pseudo-continuous-time (CT) secondary (sense) readout technique introduced in this paper is applied to the open-loop secondary readout of a gyroscope operating in the low-pass region. The proposed 5.4 mW gyroscope interface includes an on-chip HV charge-pump (CP) for excitation and signal detection. A prototype is fabricated in a 0.35 mum HVCMOS technology.
Keywords :
CMOS integrated circuits; charge pump circuits; gyroscopes; micromechanical devices; readout electronics; CMOS technology; capacitive 2-axis microgyroscope; low-pass region; on-chip HV charge-pump; open-loop secondary readout; pseudocontinuous-time secondary readout technique; signal detection; 1f noise; Angular velocity; Clocks; Filters; Gyroscopes; Micromechanical devices; Noise level; Phase noise; Sampling methods; Semiconductor device noise;
Conference_Titel :
Solid-State Circuits Conference - Digest of Technical Papers, 2009. ISSCC 2009. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-3458-9
DOI :
10.1109/ISSCC.2009.4977449
