Fabrication of low-cost plastic micromolds for microfluidic systems using X-ray LIGA

This paper presents low-cost plastic micromolds fabricated by X-ray LIGA technology. High aspect ratio microstructures are constructed by X-ray lithography process and used as a master mold for microfluidic systems. The master mold is replicated by PDMS to be used as the second mold and then transferred their patterns to plastic mold using casting method. Finally, the plastic mold performs itself as a master mold for PDMS replication which can be attached on substrate applied for microfluidic systems by plasma bonding. Some example devices have been fabricated by this method and are demonstrated in this paper.