Fabrication of low-cost plastic micromolds for microfluidic systems using X-ray LIGA

Author

Phatthanakun, R. ; Promwikorn, S. ; Pummara, W. ; Sriphung, C. ; Sutapun, B. ; Chomnawang, N.

Author_Institution

Synchrotron Light Res. Inst., Nakhon Ratchasima, Thailand

fYear

2014

fDate

14-17 May 2014

Firstpage

1

Lastpage

5

Abstract

This paper presents low-cost plastic micromolds fabricated by X-ray LIGA technology. High aspect ratio microstructures are constructed by X-ray lithography process and used as a master mold for microfluidic systems. The master mold is replicated by PDMS to be used as the second mold and then transferred their patterns to plastic mold using casting method. Finally, the plastic mold performs itself as a master mold for PDMS replication which can be attached on substrate applied for microfluidic systems by plasma bonding. Some example devices have been fabricated by this method and are demonstrated in this paper.

Keywords

LIGA; bonding processes; casting; microfluidics; moulding; plastic products; PDMS replication; X-ray LIGA technology; X-ray lithography process; casting method; high aspect ratio microstructures; low-cost plastic micromold fabrication; master mold; microfluidic systems; plasma bonding; substrate; Fabrication; Microfluidics; Plastics; Resists; Substrates; X-ray lithography; LIGA; X-ray lithography; low-cost; microfluidic; micromold; synchrotron light;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Engineering/Electronics, Computer, Telecommunications and Information Technology (ECTI-CON), 2014 11th International Conference on

Conference_Location

Nakhon Ratchasima

Type

conf

DOI

10.1109/ECTICon.2014.6839746

Filename

6839746