Title :
Reliability assessment of high temperature automated handling equipment retrofit for CDM mitigation
Author :
Koh, L.H. ; Goh Yohan ; Lim, S.H.
Author_Institution :
Everfeed Technol. Pte Ltd., Singapore, Singapore
Abstract :
Functional semiconductor automated handling equipment (AHE) manufactured decades ago with little or inadequate Electrostatic Discharge (ESD) protection consideration, have great potentials for CDM mitigation through retrofit to meet new ESD specifications. Retrofitted AHE hardware component failure is a stochastic process, where the system reliability assessment can be performed using statistical techniques.
Keywords :
automatic test equipment; electrostatic discharge; maintenance engineering; semiconductor device reliability; stochastic processes; CDM mitigation; ESD protection; charge device model; electrostatic discharge protection; functional semiconductor automated handling equipment; high temperature automated handling equipment retrofit; retrofitted AHE hardware component failure; statistical techniques; stochastic process; system reliability assessment; Electrostatic discharges; Ionization; Probability density function; Probability distribution; Reliability; Testing; Voltage control;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
Conference_Location :
Las Vegas, NV
