DocumentCode
1618986
Title
Reliability assessment of high temperature automated handling equipment retrofit for CDM mitigation
Author
Koh, L.H. ; Goh Yohan ; Lim, S.H.
Author_Institution
Everfeed Technol. Pte Ltd., Singapore, Singapore
fYear
2013
Firstpage
1
Lastpage
5
Abstract
Functional semiconductor automated handling equipment (AHE) manufactured decades ago with little or inadequate Electrostatic Discharge (ESD) protection consideration, have great potentials for CDM mitigation through retrofit to meet new ESD specifications. Retrofitted AHE hardware component failure is a stochastic process, where the system reliability assessment can be performed using statistical techniques.
Keywords
automatic test equipment; electrostatic discharge; maintenance engineering; semiconductor device reliability; stochastic processes; CDM mitigation; ESD protection; charge device model; electrostatic discharge protection; functional semiconductor automated handling equipment; high temperature automated handling equipment retrofit; retrofitted AHE hardware component failure; statistical techniques; stochastic process; system reliability assessment; Electrostatic discharges; Ionization; Probability density function; Probability distribution; Reliability; Testing; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
Conference_Location
Las Vegas, NV
ISSN
0739-5159
Type
conf
Filename
6635903
Link To Document