• DocumentCode
    1619172
  • Title

    Uncertainties in surface resistivity measurements of electrostatic dissipative materials

  • Author

    Viheriakoski, Toni ; Tamminen, Pasi ; Laajaniemi, Matti ; Karja, Eira ; Hillberg, Jukka

  • Author_Institution
    Cascade Metrol., Lohja, Finland
  • fYear
    2013
  • Firstpage
    1
  • Lastpage
    7
  • Abstract
    Contact resistance of electrostatic dissipative materials is typically higher than the resistance of the sample in a measurement circuit. In this study we have compared electrodes and estimated uncertainties in qualifications of solid planar materials. Concentric ring electrodes had significantly higher errors and higher uncertainties in comparison with the bar electrodes.
  • Keywords
    contact resistance; electrodes; electrostatics; bar electrodes; concentric ring electrodes; contact resistance; electrostatic dissipative materials; measurement circuit; solid planar materials; surface resistivity measurements; Conductivity; Current measurement; Electrical resistance measurement; Electrodes; Materials; Surface resistance; Uncertainty;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
  • Conference_Location
    Las Vegas, NV
  • ISSN
    0739-5159
  • Type

    conf

  • Filename
    6635910