Title :
Layout-aware, distributed, compact model for multi-finger MOSFETs operating under ESD conditions
Author :
Kuo-Hsuan Meng ; Rosenbaum, Elyse
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
This work presents a scalable, distributed model for multi-finger MOSFETs operating under ESD conditions. A three-terminal transmission line pulsing measurement technique enables the model parameter extraction. The distributed model can reproduce trigger voltage, on-state resistance, and non-uniform turn-on effect as functions of layout geometries.
Keywords :
MOSFET; electrostatic discharge; semiconductor device models; ESD; distributed model; electrostatic discharge; layout geometry; layout-aware compact model; multifinger MOSFET; parameter extraction; three-terminal transmission line pulsing measurement; Electrical resistance measurement; Fingers; Immune system; Layout; MOSFET; Semiconductor device modeling; Transmission line measurements;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
Conference_Location :
Las Vegas, NV
