DocumentCode
1619636
Title
Micromachined piezoelectric devices for acoustic applications
Author
Tian-Ling Ren ; Yi Shu ; Yi Yang ; Chang-Jian Zhou ; Yu-feng Wang ; He Tian ; Chang-Hai Zhang ; Hui Sun ; Xuan Liu
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2012
Firstpage
1
Lastpage
4
Abstract
Micromachining technology has been widely used to reduce the device volume and improve the reliability. Piezoelectric devices can utilize the effects of piezoelectricity and inverse piezoelectricity to generate and detect acoustic vibration. This paper presents an overview of micromachined piezoelectric devices working in several different frequency ranges and their specific applications. The device configuration and chief fabrication process are discussed.
Keywords
micromachining; microphones; piezoelectric devices; piezoelectricity; reliability; ultrasonic devices; acoustic vibration; device configuration; inverse piezoelectricity; micromachined piezoelectric devices; micromachining technology; reliability; Arrays; Fabrication; Film bulk acoustic resonators; Frequency measurement; Piezoelectric devices; Resonant frequency; FBAR; MEMS; acoustic; micromachined devices; microphone; microspeaker; pMUT; piezoelectric;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Solid State Circuit (EDSSC), 2012 IEEE International Conference on
Conference_Location
Bangkok
Print_ISBN
978-1-4673-5694-7
Type
conf
DOI
10.1109/EDSSC.2012.6482856
Filename
6482856
Link To Document