Electrostatic control and its analysis of roller transferring processes in FPD manufacturing

Author

Dong-Sun Kim ; Chun-Bae Lim ; Sung-Hyuk Yoon ; Seung-Won Jung ; Du-Seok Oh ; Jung-Tae Kim ; Hyung-Tae Kim ; Won-Joon Ho ; Soo-Youle Cha ; Yoo, Jerald ; Suh, Kwang S.

Author_Institution

OLED Panel Group, LG Display, Paju, South Korea

fYear

2013

Firstpage

1

Lastpage

6

Abstract

In recent years, the structure of a-Si based TFTs have been getting more complex and glass transferring by conveyor rollers during each process were increased accordingly. Static electricity in transferring processes is becoming a major issue because most companies to pursue high productivity. In this paper, we analyzed a point defect which was induced by electrostatic discharge event in transferring processes. Based on the analysis, we proposed the effect of ionization to minimize triboelectric charge in glass transferring systems.

Keywords

electrostatic discharge; elemental semiconductors; point defects; rollers (machinery); silicon; thin film transistors; FPD manufacturing; Si; TFT; conveyor rollers; electrostatic control; electrostatic discharge event; glass transferring; point defect; roller transferring process; static electricity; triboelectric charge; Electrodes; Electrostatic discharges; Electrostatics; Glass; Metals; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th

Conference_Location

Las Vegas, NV

ISSN

0739-5159

Type

conf

Filename

6635942