• DocumentCode
    1620108
  • Title

    Identification and verification of BEOL metal fails due to ESD stress using current density analysis tool

  • Author

    Mitra, Subhasish ; Palmer, Nicholas ; Muhammad, Muhammad ; Gauthier, R. ; Halbach, Ralph ; Seguin, Chris

  • Author_Institution
    IBM Microelectron. Semicond. R&D Center, Essex Junction, VT, USA
  • fYear
    2013
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    In this work, scaled BEOL structures with variable finger pitch and metal grids with variable spacing are tested under ESD stress. A current density analysis tool is used to simulate the hardware results. The tool is successfully verified for the metal fails for variable finger pitch and gridded structures.
  • Keywords
    current density; electrostatic discharge; BEOL metal; ESD stress; current density analysis tool; metal grids; scaled BEOL structure; variable finger pitch; variable spacing; Current density; Electrostatic discharges; Metals; Noise measurement; Resistance; Thumb;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
  • Conference_Location
    Las Vegas, NV
  • ISSN
    0739-5159
  • Type

    conf

  • Filename
    6635946
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1620108