Title :
Identification and verification of BEOL metal fails due to ESD stress using current density analysis tool
Author :
Mitra, Subhasish ; Palmer, Nicholas ; Muhammad, Muhammad ; Gauthier, R. ; Halbach, Ralph ; Seguin, Chris
Author_Institution :
IBM Microelectron. Semicond. R&D Center, Essex Junction, VT, USA
Abstract :
In this work, scaled BEOL structures with variable finger pitch and metal grids with variable spacing are tested under ESD stress. A current density analysis tool is used to simulate the hardware results. The tool is successfully verified for the metal fails for variable finger pitch and gridded structures.
Keywords :
current density; electrostatic discharge; BEOL metal; ESD stress; current density analysis tool; metal grids; scaled BEOL structure; variable finger pitch; variable spacing; Current density; Electrostatic discharges; Metals; Noise measurement; Resistance; Thumb;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
Conference_Location :
Las Vegas, NV
