Polarized radiation thermometry of silicon wafers near room temperature

Silicon semiconductor wafers near room temperature are semitransparent at a wavelength more than 1.1 /spl mu/m, which makes radiation thermometry near room temperature difficult. We have measured apparent radiances of silicon wafers with oxide film (SiO/sub 2/) near room temperature from the view point of spectral, directional and polarized properties, and obtained in turn apparent polarized emissivities and transmissivities of the wafers. Based on the experimental results, we have proposed radiation thermometry of silicon wafers near room temperature.