Development of micro universal testing machine system for material property measurement of micro structure

Author

Chung, Myung-Jin ; Oh, Seong-Guk

Author_Institution

Dept. of Mechatron. Eng., Korea Polytech. Univ., Shihung

fYear

2008

Firstpage

970

Lastpage

973

Abstract

Micro universal testing machine (UTM) System for material property measurement of micro structure is proposed. This system using for elongation, compression, repeat vibration, and thin film exfoliation test is developed by analysis of driving property of the voice coil motor (VCM), and consisted with sensing module, driving module, signal analysis module, and alignment module. To verify the applicability of developed micro UTM system in the micro structure, performance test is conducted. From the performance test, the developed micro UTM system has performance such as maximum force of 29.4 mN, unit force of 0.029 mN, full stroke of plusmn1 mm, unit stroke of 1 mum, respectively. Developed micro UTM system can be applicable in the micro structure.

Keywords

micromechanical devices; test equipment; alignment module; compression; driving module; elongation; material property measurement; microstructure; microuniversal testing machine system; repeat vibration; sensing module; signal analysis module; thin film exfoliation test; voice coil motor; Actuators; Coils; Force measurement; Material properties; Materials testing; Microactuators; Micromotors; Signal analysis; System testing; Turing machines; Micro UTM system; material property; micro structure; voice coil motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Control, Automation and Systems, 2008. ICCAS 2008. International Conference on

Conference_Location

Seoul

Print_ISBN

978-89-950038-9-3

Electronic_ISBN

978-89-93215-01-4

Type

conf

DOI

10.1109/ICCAS.2008.4694638

Filename

4694638