Controller Design for Uniform Heating using New Model with Feedback Structure

Author

Nanno, Ikuo ; Matsunaga, Nobutomo ; Kawaji, Shigeyasu

Author_Institution

Graduate Sch. of Sci. & Technol., Kumamoto Univ.

fYear

2006

Firstpage

1057

Lastpage

1062

Abstract

Thermal distribution in thermal processes, which is observed in both steady and transient states, causes inferior quality. Thus, uniform temperature control is extremely required in many industrial application fields for quality improvement. Conventional control based on black-box model is cheap for the control of thermal plant with strong interference. In this paper a novel control design method for uniform heating using the temperature difference model (TDM) and the effectiveness of the proposed controller is evaluated

Keywords

control system synthesis; feedback; quality management; semiconductor device manufacture; temperature control; control design; feedback structure; industrial application; quality improvement; steady-transient state; temperature difference model; thermal distribution; thermal plant; thermal process; uniform heating; uniform temperature control; Control design; Electronic mail; Feedback; Heat transfer; Heating; Industrial control; Interference; Temperature control; Temperature distribution; Time division multiplexing; temperature control; temperature difference model; thermal process; uniform heating;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE-ICASE, 2006. International Joint Conference

Conference_Location

Busan

Print_ISBN

89-950038-4-7

Electronic_ISBN

89-950038-5-5

Type

conf

DOI

10.1109/SICE.2006.315749

Filename

4109114