DocumentCode
1623164
Title
Simulation of a planar micro Ion Mobility Spectrometer for security applications
Author
Cumeras, R. ; Grácia, I. ; Figueras, E. ; Fonseca, L. ; Santander, J. ; Salleras, M. ; Calaza, C. ; Sabaté, N. ; Cané, C.
Author_Institution
Dept. of Micro & Nano Syst., Inst. de Microelectron. de Barcelona, Barcelona, Spain
fYear
2010
Firstpage
243
Lastpage
246
Abstract
Simulations of a planar micro Ion Mobility Spectrometer (μIMS) for sensing DMMP and Acetone vapours for security applications are performed. In μIMS ions are discriminated by the application of the proper separation voltages to the electrodes of the system. By simulation, optimum voltages for achieving the proper sensitivity have been obtained.
Keywords
gas sensors; ion mobility; security; spectrometers; DMMP; acetone vapours; electrodes; planar micro ion mobility spectrometer; security; Chemicals; Detectors; Electric fields; Electrodes; Ions; Security; Software;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Conference_Location
Smolenice
Print_ISBN
978-1-4244-8574-1
Type
conf
DOI
10.1109/ASDAM.2010.5667017
Filename
5667017
Link To Document