Ultra-precision Flexure Stage Driven by Piezoelectric Elements

This paper presents a flexure type linear parallel guide mechanism for two degree-of-freedom motions. Four prismatic-prismatic joints mechanism is implemented by the flexure type linear parallel guide mechanism which consists of four simple linear spring mechanisms and four double compound linear spring mechanisms. Each one double compound mechanism for each axis is actuated by a piezoelectric element, so that it amplifies the displacement of the piezoelectric element. The proposed flexure mechanism is designed and then monolithically machined by wire electrical discharge machining. The performance of the flexure stage manufactured is measured by the terms of resonance frequency, working range and resolution