The Digital Matching Network for a ferromagnetic Inductively Coupled Plasma driven at 400kHz

Author

Cho, S.W. ; Bang, J.Y. ; Lee, Y.K. ; Chung, C.W.

Author_Institution

Han Yang Univ., Seoul

fYear

2007

Firstpage

561

Lastpage

561

Abstract

Summary form only given. Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple and cheap. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching. Furthermore, the high speed digital auto-matching was possible by using microcontrollers.

Keywords

ferromagnetic materials; impedance matching; plasma materials processing; plasma sources; transformers; 2-channel relay; coupling coefficient; digital matching network; ferromagnetic inductively coupled plasma; frequency 400 kHz; high speed digital automatching; impedance matching; large area processing; transformer matching system; Control systems; Digital relays; Ferrites; Frequency; Impedance matching; Microcontrollers; Plasma materials processing;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2007. ICOPS 2007. IEEE 34th International Conference on

Conference_Location

Albuquerque, NM

ISSN

0730-9244

Print_ISBN

978-1-4244-0915-0

Type

conf

DOI

10.1109/PPPS.2007.4345867

Filename

4345867