Characterization and Modeling of Miniature Microwave Discharges Used for Materials Processing

Summary form only given. This paper measures the plasma density and plasma gas temperature experimentally using Langmuir probe and optical emission spectroscopy techniques. The operating pressures range from 1 Torr to 100´s Torr. The microwave powers utilized range from a few Watts to 100 Watts. The plasma discharge in the tube discharge region is modeled using both a global model and a surface wave discharge model. The flow of the plasma discharge/beam from the source, through the aperture and down to the substrate surface is also modeled. The modeling results will be compared to experimental data showing the size and shape of the region processed by the plasma discharge/beam.