Integrated RF MEMS phase shifters with constant phase shift

Author

Ko, Y.J. ; Park, J.Y. ; Bu, J.U.

Author_Institution

LG Electron. Inst. of Technol., Seoul, South Korea

Volume

3

fYear

2003

Firstpage

1489

Abstract

In this paper, fully integrated RF MEMS phase shifters with low insertion loss, narrow frequency band, and constant phase shift are designed, fabricated, and characterized for mobile satellite broadcasting/communication systems. The fabricated phase shifters are comprised of CPW lines, short/open ended-stubs, and RF MEMS capacitive shunt switches. The constant phase shift can be obtained by optimizing the length of the open-ended stub and the short-ended stub. The fabricated 3-bit phase shifter has insertion loss of avg. -2.0 dB, return loss of min. -10 dB, and phase error of avg. 2.0/spl deg/, respectively. The utilized RF MEMS switches are operated at between 15 and 20 volts.

Keywords

coplanar waveguide components; microswitches; phase shifters; -10 dB; -2.0 dB; 15 to 20 V; 3 bit; CPW line; RF MEMS phase shifter; capacitive shunt switch; insertion loss; mobile satellite broadcasting; mobile satellite communication system; open-ended stub; return loss; short-ended stub; Equations; Frequency; Insertion loss; Phase shifters; Phased arrays; Radar antennas; Radiofrequency microelectromechanical systems; Satellite broadcasting; Switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2003 IEEE MTT-S International

Conference_Location

Philadelphia, PA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7695-1

Type

conf

DOI

10.1109/MWSYM.2003.1210418

Filename

1210418