• DocumentCode
    1624798
  • Title

    BaTiO3 based Carbon-dioxide gas sensor

  • Author

    Rudraswamy, S.B. ; Basu, Palash Kumar ; Bhat, Nagaraj

  • Author_Institution
    Dept. of Electr. Commun. Eng., Indian Inst. of Sci., Bangalore, India
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    BaTiO3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evaluated. The 55 nm thick unannealed films show the highest sensitivity of 10% for 500ppm of CO2, at an operating temperature of 200°C.
  • Keywords
    annealing; barium compounds; carbon compounds; gas sensors; semiconductor thin films; sputter deposition; BaTiO3; BaTiO3 based thin films; CO2; RF sputtering; Si; annealing effect; carbon-dioxide gas sensor; metal oxide films; oxidized p-Si (100) substrate; sensitivity; size 18 nm to 55 nm; temperature 200 degC; Annealing; Optical device fabrication; Optical films; Optical sensors; Silicon; BaTiO3; Carbon dioxide; Gas sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Emerging Electronics (ICEE), 2012 International Conference on
  • Conference_Location
    Mumbai
  • Print_ISBN
    978-1-4673-3135-7
  • Type

    conf

  • DOI
    10.1109/ICEmElec.2012.6636269
  • Filename
    6636269
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1624798