Title :
Evaluation of cluster tool throughput for thin film head production
Author :
Koehler, Eric J. ; Wulf, Timbur M. ; Bruska, Alvin C. ; Seppanen, Marvin S.
Author_Institution :
Dept. of Wafer Syst. Eng., Seagate Technol., Bloomington, MN, USA
fDate :
6/21/1905 12:00:00 AM
Abstract :
This paper describes the application of simulation for analyzing cluster tool cycle times and cluster tool capacity planning. The objective of this project was to develop a flexible and expandable tool for rapidly calculating tool cycle times for a multiple step process through alternative tool configurations. The calculated process cycle times are then used to calculate equipment tool set requirements against product demand. The Seagate Industrial Engineering group utilized a simulation based cluster tool model developed to predict cluster tool cycle times and analyze cluster tool capacity across multiple tools and compare with results from static probability based model predictions
Keywords :
coating techniques; disc drives; electronics industry; hard discs; magnetic thin film devices; manufacturing processes; production control; Seagate Industrial Engineering group; chemical etching; cluster tool capacity planning; cluster tool cycle times; cluster tool throughput; equipment tool set requirements; hard drive storage technologies; photolithography; process cycle times; product demand; simulation; static probability based model predictions; thin film head production; vacuum metal deposition; wafer fabrication; End effectors; Magnetic heads; Magnetic materials; Parallel processing; Parallel robots; Production; Semiconductor device modeling; Sputtering; Throughput; Transistors;
Conference_Titel :
Simulation Conference Proceedings, 1999 Winter
Conference_Location :
Phoenix, AZ
Print_ISBN :
0-7803-5780-9
DOI :
10.1109/WSC.1999.823199
