Title :
Evaluation of CVD diamond for heavy duty microwave switches
Author :
Kohn, E. ; Menzel, W. ; Hernandez-Guillen, F.J. ; Muller, R. ; Munding, A. ; Schmid, P. ; Grobe, D. ; Kusterer, J.
Author_Institution :
Dept. of Electron Devices & Circuits, Ulm Univ., Germany
Abstract :
In this contribution, the use of CVD diamond as a multi-functional material for DC coupled microwave switches is discussed. CVD diamond is a new MEMS material with extraordinary properties, especially for heavy duty applications in extreme environments. An all-diamond cantilever based switch is described using two different actuation principles. First results for a coplanar waveguide configuration are presented.
Keywords :
CVD coatings; coplanar waveguide components; diamond; electrostatic actuators; elemental semiconductors; micromachining; microswitches; microwave switches; C; CVD diamond heavy duty microwave switches; DC coupled microwave switch multi-functional materials; MEMS materials; all-diamond cantilever based switches; bi-metal effect switching; coplanar waveguide switch configuration; diamond micromachining technology; electrostatically activated switches; extreme environment operation; mechanical microswitches; thermal actuation; Conducting materials; Contacts; Electromagnetic heating; Insulation; Micromechanical devices; Microwave devices; Microwave theory and techniques; Substrates; Switches; Thermal conductivity;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1210449
