DocumentCode
1625366
Title
Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)
fYear
1994
Abstract
The following topics were dealt with: future factories; frontiers in process technology; manufacturing improvements through team derived activities; contamination free manufacturing; self-directed work teams; yield and reliability; SECS; simulation and wafer control; cost control; process improvement methodologies; in-line defect detection; characterization and management; metrology
Keywords
semiconductor device manufacture; CIM; SECS; contamination free manufacturing; cost control; defect detection; future factories; metrology; process improvement methodologies; process technology; reliability; self-directed work teams; semiconductor manufacturing; simulation; team derived activities; wafer control; yield;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location
Cambridge, MA, USA
Print_ISBN
0-7803-2053-0
Type
conf
DOI
10.1109/ASMC.1994.588127
Filename
588127
Link To Document