Title :
Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)
Abstract :
The following topics were dealt with: future factories; frontiers in process technology; manufacturing improvements through team derived activities; contamination free manufacturing; self-directed work teams; yield and reliability; SECS; simulation and wafer control; cost control; process improvement methodologies; in-line defect detection; characterization and management; metrology
Keywords :
semiconductor device manufacture; CIM; SECS; contamination free manufacturing; cost control; defect detection; future factories; metrology; process improvement methodologies; process technology; reliability; self-directed work teams; semiconductor manufacturing; simulation; team derived activities; wafer control; yield;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI
Conference_Location :
Cambridge, MA, USA
Print_ISBN :
0-7803-2053-0
DOI :
10.1109/ASMC.1994.588127
