Analysis of Contact Resistance Data with Weibull Distribution Function

In order to realize detailed analysis of measured contact resistance data, fitting of Weibull distribution function to contact resistance data is being tried. For that purpose, the original Weibull fitting software has been prepared, and applied to some sets of the measured data. When successful fitting results are obtained, an average value of the contact resistance data can be replaced with the sum of two Weibull parameters, i.e., the location parameter Ro and the scale parameter Ra. However, more revisions to the fitting algorithm are still required for realizing further study of contact resistance characteristics through the Weibull fitting analysis.